Introduction to MEMS
Also listed as: מבוא להנדסת מערכות זעירות
Micro-electromechanical systems from cleanroom process to device model. One of the genuine research strengths of the school, and the densest course in the catalogue at five hours.
- Semester
- Semester B
- Weekly hours
- 5h
- Counts as
- Department electives
- Interest areas
- Miniaturised systems and materials · Mechatronics and robotics · Structures and computational mechanics
Comes after
- Mechanics of solids 1
- Vibrations (recommended)
Opens up
- Micro-systems and nanotechnology research
What it covers
Fabrication
- Photolithography
- Deposition: LPCVD, sputtering, evaporation
- Etching: wet, and deep reactive ion etching
- Bulk against surface micromachining, wafer bonding, LIGA
- Process integration and its constraints
Devices and physics
- Scaling laws, and why intuition from macro-scale design fails
- Lumped-element and energy-domain modelling
- Mechanics of microstructures: beams, plates, residual stress
- Electrostatic actuation and pull-in instability
- Capacitive and piezoresistive sensing
- Piezoelectric and thermal transducers
- Introduction to microfluidics
- Squeeze-film damping, noise, packaging
- Case studies: pressure sensors, accelerometers, gyroscopes, resonators
Results worth carrying out
Pull-in voltage
Parallel-plate capacitance
Piezoresistive response
Squeeze-film damping
Figures worth knowing
- Process cross-section flow diagrams
- Pull-in voltage against displacement curves
- Comb-drive and cantilever schematics
- SEM micrographs
Related courses
- 0542-4011Semester A · 3h
Research project for honours students 1
פרויקט מחקר למצטיינים 1
The honours research project, and the most direct on-ramp to a thesis in the catalogue. You pick a supervisor, produce results, and frequently continue the same problem into a masters.
Structures and computational mechanicsMechatronics and roboticsMiniaturised systems and materialsAeronautics and spaceEnvironment and energyFlow and thermal designMechanical design - 0542-4012Semester B · 3h
Research project for honours students 2
פרויקט מחקר למצטיינים 2
The continuation of the honours project, where the results get deep enough to defend. Under the direct track this is already the first part of the masters thesis.
Structures and computational mechanicsMechatronics and roboticsMiniaturised systems and materialsAeronautics and spaceEnvironment and energyFlow and thermal designMechanical design - 0512-1206Not fixed · 5.5h
Basic electronics for mechanical engineering
אלקטרוניקה בסיסית להנדסה מכנית
The electronics literacy a mechanical engineer needs to instrument anything. Rarely a job title on its own, and a hard prerequisite for being useful in mechatronics, robotics or sensing.
Mechatronics and roboticsMiniaturised systems and materials - 0542-4166Not fixed · 3h
Analytical mechanics
מכניקה אנליטית
Lagrangian and Hamiltonian mechanics: the reformulation that makes multibody dynamics, robotics and orbital mechanics tractable. It maps to no job title and improves your work in three tracks.
Structures and computational mechanicsAeronautics and spaceMechatronics and robotics
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The topic outlines are not official syllabi. The university publishes a catalogue blurb per course, not lecture-by-lecture material, so each outline describes what a course of that name, at those hours, with those prerequisites teaches at engineering schools generally, cross-checked against the standard textbook for the subject. Treat it as an informed map, not as a transcript of the lectures.